Litcius/Paper detail

WaferSegClassNet - A light-weight network for classification and segmentation of semiconductor wafer defects

Subhrajit Nag, Dhruv Makwana, Sai Chandra Teja R, Sparsh Mittal, C. Krishna Mohan

2022Computers in Industry86 citationsDOIOpen Access PDF

Topics & Concepts

WaferSemiconductorSegmentationComputer scienceArtificial intelligenceSemiconductor industryMaterials scienceOptoelectronicsReliability engineeringPattern recognition (psychology)EngineeringManufacturing engineeringIndustrial Vision Systems and Defect DetectionIntegrated Circuits and Semiconductor Failure AnalysisAdvancements in Photolithography Techniques