Modeling and simulation of phase transformation and crack formation during scribing of mono-crystalline silicon
Peizhi Wang, Bing Wang, Shreyes N. Melkote
Topics & Concepts
Materials scienceIndentationComposite materialSiliconConstitutive equationYield (engineering)Finite element methodBrittlenessDeformation (meteorology)Structural engineeringMetallurgyEngineeringAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationMetal and Thin Film Mechanics