Uniform high-reflectivity silver film deposited by planar magnetron sputtering
Liyang Mao, Yanquan Geng, Yongzhi Cao, Yongda Yan
Topics & Concepts
Materials scienceAluminiumCavity magnetronSputter depositionDeposition (geology)CoatingPlanarReflectivityAlloySputteringOpticsComposite materialHigh-power impulse magnetron sputteringThin filmOptoelectronicsNanotechnologyComputer sciencePhysicsPaleontologyBiologyComputer graphics (images)SedimentOptical Coatings and GratingsFluid Dynamics and Thin FilmsCopper Interconnects and Reliability