Understanding the adsorption mechanism of benzotriazole and its derivatives as effective corrosion inhibitors for cobalt in chemical mechanical polishing
Jie Cheng, Yaran Lv, Fan Zhang, Peng Han, Qinhua Miao, Zhenxiang Huang
Topics & Concepts
BenzotriazoleChemical-mechanical planarizationAdsorptionCobaltCorrosionMechanism (biology)PolishingChemistryMaterials scienceChemical engineeringCombinatorial chemistryNanotechnologyMetallurgyOrganic chemistryEngineeringPhilosophyEpistemologyCorrosion Behavior and InhibitionAdvanced materials and compositesAdvanced Surface Polishing Techniques