High mobility and productivity of flexible In2O3 thin-film transistors on polyimide substrates via atmospheric pressure spatial atomic layer deposition
Kwang Su Yoo, Chi-Hoon Lee, Dong-Gyu Kim, Su‐Hwan Choi, Won-Bum Lee, Chang‐Kyun Park, Jin‐Seong Park
Topics & Concepts
Materials scienceThin-film transistorAtomic layer depositionCrystallinityLayer (electronics)OptoelectronicsThreshold voltageThin filmAtmospheric pressureElectron mobilityTransistorAnalytical Chemistry (journal)NanotechnologyComposite materialVoltageElectrical engineeringChemistryGeologyEngineeringChromatographyOceanographyThin-Film Transistor TechnologiesZnO doping and propertiesGa2O3 and related materials