Selective electrochemical etching of epitaxial aluminum nitride thin film
Yongha Choi, Rak-Jun Choi, Jihyun Kim
Topics & Concepts
EpitaxyMaterials scienceEtching (microfabrication)NitrideElectrochemistryAluminiumThin filmOptoelectronicsNanotechnologyMetallurgyChemistryElectrodeLayer (electronics)Physical chemistryGaN-based semiconductor devices and materialsSemiconductor materials and devicesAcoustic Wave Resonator Technologies