Controlling the parameters of focused ion beam for ultra-precise fabrication of nanostructures
A S Kolomiytsev, A. L. Gromov, O. I. Il’in, I V Panchenko, A.V. Kotosonova, Abdelhakim Ballouk, Daniel J. Rodriguez, О. А. Агеев
Topics & Concepts
Focused ion beamNanoscopic scaleIon beamNanostructureMaterials scienceDwell timeIon currentNanotechnologyFabricationBeam (structure)IonOpticsChemistryPhysicsPathologyMedicineAlternative medicineOrganic chemistryClinical psychologyIon-surface interactions and analysisAdvanced Surface Polishing TechniquesElectron and X-Ray Spectroscopy Techniques