Effects of growth temperature on phase transformation and crystal quality of Ga2O3 films grown on Si/AlN composite substrates by MOCVD
Yu Hu, Li Zhang, Tiwei Chen, Zijing Huang, Botong Li, Huanyu Zhang, Gaofu Guo, Dengrui Zhao, Kun Xu, Xiaodong Zhang, Wenhua Shi, Zhongming Zeng, Baoshun Zhang
Topics & Concepts
Materials scienceMetalorganic vapour phase epitaxyComposite numberPhase (matter)Transformation (genetics)Crystal (programming language)Composite materialOptoelectronicsEpitaxyLayer (electronics)Computer scienceProgramming languageOrganic chemistryChemistryBiochemistryGeneGa2O3 and related materialsAdvanced Photocatalysis TechniquesZnO doping and properties