The mechanisms of material removal and atomic-scale damage in InP during elliptical vibration-assisted nanoscratching integrated with laser processing
Jiqiang Wang, Yue Liu, Yongda Yan, Shaoqin Liu, Chen Li, Yanquan Geng
Topics & Concepts
Materials scienceAmorphous solidTransmission electron microscopyMachiningIndium phosphideLaserOptoelectronicsComposite materialPhosphideMetallurgyLayer (electronics)Strain rateAtomic force microscopyEmbrittlementPhotoelectric effectThin filmNanotechnologyDiodeOpticsMicrostructureAmorphous metalPenetration depthHigh-resolution transmission electron microscopyHillockIndentation hardnessAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchLaser Material Processing Techniques