Study on material removal mechanisms in electrochemical etching-enhanced polishing of GaN
Linfeng Zhang, Dong Lu, Hui Deng
Topics & Concepts
PolishingMaterials scienceEtching (microfabrication)Layer (electronics)PhotoluminescenceElectrochemistryChemical-mechanical planarizationSurface roughnessSurface finishComposite materialNanotechnologyChemical engineeringOptoelectronicsElectrodeChemistryEngineeringPhysical chemistrySemiconductor materials and devicesGaN-based semiconductor devices and materialsMetal and Thin Film Mechanics