Chip-level orthometric surface acoustic wave device with AlN/metal/Si multilayer structure for sensing strain at high temperature
Fanbing Hu, Lina Cheng, Shuyao Fan, Xufeng Xue, Yong Liang, Ming‐Hui Lu, Wen Wang
Topics & Concepts
Materials scienceResonatorSensitivity (control systems)Surface acoustic wavePiezoelectricitySubstrate (aquarium)PerpendicularFinite element methodSputter depositionChipOptoelectronicsStrain (injury)SputteringAcousticsComposite materialElectronic engineeringThin filmElectrical engineeringStructural engineeringMathematicsGeologyGeometryMedicineOceanographyNanotechnologyEngineeringInternal medicinePhysicsAcoustic Wave Resonator TechnologiesUltrasonics and Acoustic Wave PropagationAdvanced Fiber Optic Sensors