MEMS-based metamaterial grating waveguide for tunable optical attenuator and modulator applications
Peiyu Chen, Wei‐Kai Huang, Qiuxiao Feng, Yuwei Liu, Yu‐Sheng Lin
Topics & Concepts
Attenuator (electronics)Materials scienceOptical attenuatorMicroelectromechanical systemsMetamaterialWaveguideGratingOptoelectronicsOpticsOptical modulatorElectro-optic modulatorOptical fiberAttenuationPhysicsFiber optic sensorPhase modulationPhase noisePhotonic and Optical DevicesPlasmonic and Surface Plasmon ResearchOptical Coatings and Gratings