Controlled boron content in lightly B-doped single crystal diamond films by variation of methane concentration
Rozita Rouzbahani, Paulius Pobedinskas, Fabrice Donatini, Deniz Wong, Julien Pernot, Ken Haenen
Topics & Concepts
Chemical vapor depositionBoronMaterials scienceAnalytical Chemistry (journal)MethaneX-ray photoelectron spectroscopyElectron mobilityDopingChemistryChemical engineeringNanotechnologyOptoelectronicsChromatographyOrganic chemistryEngineeringDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsBoron and Carbon Nanomaterials Research