Gray-box modeling of 300 mm diameter Czochralski single-crystal Si production process
Shota Kato, Sanghong Kim, Manabu Kano, T. Fujiwara, Masahiko Mizuta
Topics & Concepts
Materials scienceCzochralski methodCrystallographyProcess (computing)SiliconMetallurgyComputer scienceChemistryOperating systemSolidification and crystal growth phenomenaMetallurgy and Material FormingAluminum Alloy Microstructure Properties