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Gray-box modeling of 300 mm diameter Czochralski single-crystal Si production process

Shota Kato, Sanghong Kim, Manabu Kano, T. Fujiwara, Masahiko Mizuta

2020Journal of Crystal Growth17 citationsDOIOpen Access PDF

Topics & Concepts

Materials scienceCzochralski methodCrystallographyProcess (computing)SiliconMetallurgyComputer scienceChemistryOperating systemSolidification and crystal growth phenomenaMetallurgy and Material FormingAluminum Alloy Microstructure Properties
Gray-box modeling of 300 mm diameter Czochralski single-crystal Si production process | Litcius