A systematic review of magnetron sputtering of AlN thin films for extreme condition sensing
Fredrick Madaraka Mwema, Esther T. Akinlabi, Oluseyi Philip Oladijo
Topics & Concepts
Materials scienceSputter depositionCeramicThin filmSputteringOptoelectronicsAluminium nitrideSapphireMicroelectromechanical systemsPiezoelectricityPressure sensorAluminiumComposite materialEngineering physicsMechanical engineeringNanotechnologyOpticsEngineeringLaserPhysicsAcoustic Wave Resonator TechnologiesGaN-based semiconductor devices and materialsMetal and Thin Film Mechanics