Realization of ferroelectricity in sputtered Al1-xScxN films with a wide range of Sc content
Juan Xi, Dayu Zhou, Tianming Lv, Yi Tong, Qidi Kou, Yongsong Zhao
Topics & Concepts
Materials scienceFerroelectricityRealization (probability)Content (measure theory)Range (aeronautics)NanotechnologyOptoelectronicsComposite materialDielectricMathematical analysisStatisticsMathematicsAcoustic Wave Resonator TechnologiesFerroelectric and Piezoelectric MaterialsMetal and Thin Film Mechanics