Mass Partitioning in Fragmenting Tin Sheets
Bo Liu, Randy A. Meijer, Wei Li, Javier Hernandez‐Rueda, Hanneke Gelderblom, O. O. Versolato
Abstract
This article reports experiments on the mass partitioning of a fragmenting liquid sheet, formed after the impact of a nanosecond laser pulse on a tin microdroplet, to help in optimizing mass utilization of the liquid tin that is key to extreme-ultraviolet nanolithography. The authors apply machine learning to analyze subresolution fragments in the temporal evolution of the sheet and its bounding rim, ligaments protruding from the rim, and droplets shed by the ligaments. A full accounting includes the further contributions unique to laser-droplet impact: the mass ablated by the laser, and a surprising, centrally located mass remnant.
Topics & Concepts
TinMaterials scienceBounding overwatchExtreme ultravioletExtreme ultraviolet lithographyLaserNanosecondHigh massNanotechnologyOpticsComputer sciencePhysicsMetallurgyAstrophysicsArtificial intelligenceFluid Dynamics and Heat TransferLaser-induced spectroscopy and plasmaIon-surface interactions and analysis