Molecular dynamics study of crystal orientation effect on surface generation mechanism of single-crystal silicon during the nano-grinding process
Pengyue Zhao, Jiansheng Pan, Bo Zhao, Jianwei Wu
Topics & Concepts
Materials scienceCrystal (programming language)GrindingMolecular dynamicsSiliconMachiningResidual stressSingle crystalMonocrystalline siliconWork (physics)Nano-Composite materialCrystallographyMechanical engineeringMetallurgyComputational chemistryComputer scienceEngineeringChemistryProgramming languageAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationLaser Material Processing Techniques