Surface topography and subsurface structure evolution in laser micro polishing of monocrystalline silicon
Weiqi Huang, Tao Li, Gui Long, Chuangting Lin, Kai Huang, Zhengding Zheng, Junfeng Xiao, Jianguo Zhang, Jianfeng Xu
Topics & Concepts
Monocrystalline siliconPolishingMaterials scienceSiliconSurface roughnessWaferOpticsOptoelectronicsComposite materialPhysicsLaser Material Processing TechniquesAdvanced Surface Polishing TechniquesLaser-induced spectroscopy and plasma