Structural damage characteristics of MoSe2 nanosheets irradiated by oxygen ions
Hong-Lian Song, Xiaofei Yu
Abstract
Molybdenum diselenide (MoSe2) is one of the most valuable Two-dimensional transition metal dichalcogenides (TMDs) materials due to their unique and exotic physical properties. Its properties can be easily altered in an irradiation environment and therefore affect the properties of MoSe2 based devices. In this work, we discussed the effect of oxygen ion irradiation on the structures and optical band gap (Eg) of the MoSe2 continuous nanosheets on sapphire substrates by using complementary characterization techniques. The results show that more lattice disorder and lattice damage induced by high fluences oxygen ion irradiation led to the structural degradation and produced tensile stress in the nanosheets. Average optical absorption rate decreased and Eg decreased from 1.495 eV to 1.46 eV. The results will be helpful for understanding the damage study of the MoSe2 continuous nanosheets with oxygen ion irradiation.