Effect of annealing atmosphere (CO and N2 gas flow) on surface morphology and crystal quality of AlN buffer layer
Cheng Cheng, Wei-Han Lai, Chun-Kai Huang, Cheng‐Yi Liu
Topics & Concepts
Materials scienceAnnealing (glass)NitrideSurface roughnessSublimation (psychology)Analytical Chemistry (journal)Chemical engineeringComposite materialLayer (electronics)ChemistryPsychologyPsychotherapistEngineeringChromatographyGaN-based semiconductor devices and materialsGa2O3 and related materialsZnO doping and properties