Crystalline ZrO2 films with reduced oxygen vacancy and surface roughness for corrosion protection by atomic layer deposition
Minjae Kim, Jeong Yun Hwang, Dongeun Kim, Taehwan Song, Kyu Hyoung Lee, Hyung‐Ho Park
Topics & Concepts
Materials scienceCorrosionMonoclinic crystal systemCoatingTetragonal crystal systemAtomic layer depositionZirconiumLayer (electronics)Chemical engineeringPhase (matter)Surface roughnessDeposition (geology)MetallurgyComposite materialCrystallographyCrystal structureOrganic chemistryBiologyChemistryPaleontologyEngineeringSedimentSemiconductor materials and devicesElectronic and Structural Properties of OxidesCatalytic Processes in Materials Science