Deep purification of perfluorinated electronic specialty gas with a scalable metal–organic framework featuring tailored positive potential traps
Wei Xia, Zhijie Zhou, Liangzheng Sheng, Lihang Chen, Zheng Fang, Zhiguo Zhang, Qiwei Yang, Qilong Ren, Zongbi Bao
Topics & Concepts
Metal-organic frameworkScalabilityEnvironmental scienceMaterials scienceNanotechnologyEnvironmental chemistryProcess engineeringChemistryComputer scienceOrganic chemistryEngineeringDatabaseAdsorptionMetal-Organic Frameworks: Synthesis and ApplicationsInorganic Fluorides and Related CompoundsOrganic and Molecular Conductors Research