The influence of the nanostructure design on the optical, electrical and thermal properties of TiNx thin films prepared by reactive magnetron sputtering
C. Lopes, Marco S. Rodrigues, Armando Ferreira, F. Macedo, Ioana Borsan, Camelia Gabor, Mihai Alin Pop, E. Alves, N.P. Barradas, Daniel Munteanu, F. Vaz
Topics & Concepts
Materials scienceThin filmElectrical resistivity and conductivitySputteringNanostructureSputter depositionThermal diffusivityTitanium nitrideComposite materialOptoelectronicsNitrideNanotechnologyLayer (electronics)EngineeringElectrical engineeringPhysicsQuantum mechanicsMetal and Thin Film MechanicsGaN-based semiconductor devices and materialsZnO doping and properties