Suppressing-accelerating effect of Nitrotetrazolium Blue chloride in boosting superconformal cobalt filling
Yaqiang Li, Xiaochuan Ma, Ruopeng Li, Jinqiu Zhang, Peixia Yang, Anmin Liu, Bo Wang, Peter Broekmann, Maozhong An
Topics & Concepts
ChemistryCobaltChronoamperometryElectrochemistryLinear sweep voltammetryCyclic voltammetryDielectric spectroscopyChlorideRaman spectroscopyAdsorptionAnalytical Chemistry (journal)Inorganic chemistryElectrodePhysical chemistryOpticsChromatographyOrganic chemistryPhysicsElectrodeposition and Electroless CoatingsElectrocatalysts for Energy ConversionElectrochemical Analysis and Applications