Double Zone Thermal CVD and Plasma Enhanced CVD Systems for Deposition of Films/Coatings with Eminent Conformal Coverage
Shreya, Anukool Yadav, Ritika Khatri, Nikita Jain, Anurag Bhandari, Nitin K. Puri
Topics & Concepts
Plasma-enhanced chemical vapor depositionChemical vapor depositionMaterials scienceDeposition (geology)Substrate (aquarium)Combustion chemical vapor depositionNanotechnologyPlasmaPlasma processingThin filmThermalNanomaterialsOptoelectronicsChemical engineeringCarbon filmEngineeringGeologyPhysicsSedimentMeteorologyPaleontologyOceanographyQuantum mechanicsSemiconductor materials and devicesDiamond and Carbon-based Materials ResearchMetal and Thin Film Mechanics