Effect of synergetic inhibition of nonionic surfactant and benzotriazone for molybdenum in chemical mechanical polishing

Pengfei Wu, Baoguo Zhang, Ye Wang, Mengchen Xie, Shitong Liu, Min Liu, Wenhao Xian, Dexing Cui, Kai Zhang

2023Colloids and Surfaces A Physicochemical and Engineering Aspects19 citationsDOI

Topics & Concepts

BenzotriazoleFatty alcoholAdsorptionChemical-mechanical planarizationMolybdenumScanning electron microscopeX-ray photoelectron spectroscopyPulmonary surfactantMaterials sciencePolishingElectrochemistryLayer (electronics)Chemical engineeringChemistryEtherNanotechnologyComposite materialPhysical chemistryOrganic chemistryMetallurgyElectrodeEngineeringAdvanced Surface Polishing TechniquesSemiconductor materials and devicesCopper Interconnects and Reliability