Enhancement mechanism of chemical mechanical polishing for single-crystal 6H-SiC based on Electro-Fenton reaction
Jiayun Deng, Jiabin Lu, Qiusheng Yan, Jisheng Pan
Topics & Concepts
PolishingSlurryChemical-mechanical planarizationChemistryHydroxyl radicalRadicalElectric fieldAnalytical Chemistry (journal)Chemical engineeringMaterials scienceNuclear chemistryComposite materialChromatographyOrganic chemistryPhysicsEngineeringQuantum mechanicsAdvanced Surface Polishing TechniquesMetal Extraction and BioleachingDiamond and Carbon-based Materials Research