Silicon Photonics Platform for Next Generation Data Communication Technologies
Shi‐Jay Yeh, Cheng‐Ting Shih, F. Yuan, Chih-Ming Hung, C. H. Chu, Hongyan Lu, Jinghai Yang, Wai‐Sum Lo, C.H. Chen, Su-Yueh Tsai, W.C. Tai, S. C. Liu, S.D. Wang, Kai-Shin Wen, W.C. Wang, C.C. Tung, Bencai Lin, Fangrong Hu, P.C. Yeh, Chun Huang, Tsung-Han Wu, C. C. Chu, W.C. Kuo, Chia-Heng Tsai, S. W. Chang, E.C. Chen, Ching-Wen Chiang, Yike Wang, Fuchun Huang, Saijun Wu, J.‐Y. Lin, Cheng-Tse Tang, Wei–Ting Liu, T.L. Hsieh, W.J. Mao, Win‐Tsung Lo, Cheng‐Yuan Peng, Shuenn‐Kung Su, F. Tsui, N. Shi, Vanessa Shih, Shih-Fen Huang
Abstract
TSMC has developed an advanced silicon photonics foundry platform tailored to meet the increasing demands of next-generation data communication applications. This paper presents an overview of the platform and the performance of key photonic devices.