Preparation of non-stoichiometric Al2O3 film with broadband antireflective by magnetron sputtering
Chao Ma, Changjiang Zhao, Xiaowei Fan, Zhigang Liu, Juncheng Liu
Topics & Concepts
Materials scienceTransmittanceAnti-reflective coatingAmorphous solidSputter depositionRefractive indexStoichiometryBilayerSputteringThin filmCavity magnetronOpticsAnalytical Chemistry (journal)OptoelectronicsLayer (electronics)Composite materialChemistryCrystallographyNanotechnologyMembraneOrganic chemistryBiochemistryChromatographyPhysicsOptical Coatings and GratingsThin-Film Transistor TechnologiesGa2O3 and related materials