Effects of Atomic-Layer-Deposition temperature on the properties of Al2O3 insulators and InAlZnO Thin-Film-Transistors with Dual-Active-Layer structure
Weidong Xu, Guanqun Zhang, Xianjin Feng
Topics & Concepts
Materials scienceThin-film transistorAtomic layer depositionOptoelectronicsTransistorThin filmLayer (electronics)Threshold voltageNanotechnologyVoltageElectrical engineeringEngineeringThin-Film Transistor TechnologiesSemiconductor materials and devicesZnO doping and properties