High Driving Frequency (>54 kHz) and Wide Scanning Angle (>100 Degrees) MEMS Mirror Applying Secondary Resonance For 2K Resolution AR/MR Glasses
Kensuke Mihara, Kaito Hanatani, Takami Ishida, Kazuki Komaki, Ryoichi Takayama
20222022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)17 citationsDOI
Abstract
We have successfully realized the MEMS mirror which can scan the wide optical angle of over 100 degrees at the driving frequency of 58 kHz by applying the secondary resonance mode driving design and the new stress dispersion structure to our “Double-Tuning-Fork type MEMS mirror” which was reported in “MEMS 2020” [1]. This MEMS mirror paves the way for realizing a high resolution “2K (2560 × 1440@60 fps)” in the laser beam scanning system employing the two-scanning-mirror architecture where each mirror in responsible for one axis [2], which was impossible with conventional MEMS mirrors.
Topics & Concepts
Microelectromechanical systemsMaterials scienceResolution (logic)Resonance (particle physics)OpticsPhysicsOptoelectronicsComputer scienceAtomic physicsArtificial intelligenceAdvanced MEMS and NEMS TechnologiesPhotonic and Optical DevicesAdvanced Surface Polishing Techniques