Honeycomb-like gallium nitride prepared via dual-ion synergistic etching mechanism using amino acid as etchant
Zi'ang Zhang, Shaohui Zhang, Long Zhang, Zeng Liu, Haifeng Zhang, Jiafan Chen, Quan Zhou, Lifan Nie, Zhaobo Dong, Ge‐Bo Pan
Topics & Concepts
DissolutionEtching (microfabrication)Amino acidHoneycombGalliumChemistryMaterials scienceChemical engineeringNitrideIonNanotechnologyInorganic chemistryOrganic chemistryComposite materialBiochemistryEngineeringLayer (electronics)ZnO doping and propertiesGaN-based semiconductor devices and materialsGa2O3 and related materials