Metrological characteristics for the calibration of surface topography measuring instruments: a review
Richard Leach, Han Haitjema, Rong Su, Adam Thompson
Abstract
Abstract In this paper, we will review the development and use of an ISO standardised framework to allow calibration of surface topography measuring instruments. We will draw on previous work to present the state of the art in the field in terms of employed methods for calibration and uncertainty estimation based on a fixed set of metrological characteristics. The resulting standards will define the metrological characteristics and present default methods and material measures for their determination—the paper will summarise this work and point out areas where there is still some work to do. An example uncertainty estimation is given for an optical topography measuring instrument, where the effect of topography fidelity is considered.