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Investigation of cracking in monocrystalline silicon induced by high- temperature indentation

Zerui Zhao, Shuilong Zhou, Xianke Li, Bo Zhu, Shanyue Guan, Shunbo Wang, Hongwei Zhao, Hongwei Zhao

2024Engineering Failure Analysis10 citationsDOI

Topics & Concepts

Monocrystalline siliconIndentationCrackingMaterials scienceComposite materialSiliconForensic engineeringMetallurgyEngineeringAdvanced Surface Polishing TechniquesMetal and Thin Film MechanicsIon-surface interactions and analysis
Investigation of cracking in monocrystalline silicon induced by high- temperature indentation | Litcius