High-quality transparent conductive indium oxide film deposition by reactive pulsed magnetron sputtering: Determining the limits of substrate heating
Shuai Guo, Wahyu Diyatmika, Yeliz Unutulmazsoy, Lei Yang, Bing Dai, Liangge Xu, Jiecai Han, Victor Ralchenko, André Anders, Jiaqi Zhu
Topics & Concepts
Materials scienceCrystallinityThin filmSubstrate (aquarium)IndiumSputter depositionOxideSputteringTransparent conducting filmMicrostructureOptoelectronicsDopingPulsed DCChemical engineeringNanotechnologyComposite materialMetallurgyGeologyEngineeringOceanographyZnO doping and propertiesGas Sensing Nanomaterials and SensorsThin-Film Transistor Technologies