Two-dimensional Hanning self-convolution window for enhancing Moiré fringe alignment in lithography
Feifan Xu, Yulu Zhao, Lanlin Ni, Qiang Wu, Haojie Xia
Topics & Concepts
Window functionSpectral leakageLeakage (economics)Window (computing)LithographyMoiré patternComputer scienceOpticsStructured-light 3D scannerConvolution (computer science)Process windowElectronic engineeringAlgorithmSpectral densityArtificial intelligenceComputer visionFast Fourier transformEngineeringPhysicsMacroeconomicsArtificial neural networkScannerOperating systemEconomicsTelecommunicationsImage Processing Techniques and ApplicationsOptical measurement and interference techniquesIntegrated Circuits and Semiconductor Failure Analysis