Bidirectional doping of two-dimensional thin-layer transition metal dichalcogenides using soft ammonia plasma
Pu Tan, Kaixuan Ding, Xiu‐Mei Zhang, Zhenhua Ni, Kostya Ostrikov, Xiaofeng Gu, Haiyan Nan, Shaoqing Xiao
Abstract
Raman, photoluminescence (PL), atomic force microscopy (AFM), X-ray photoelectron spectroscopy (XPS) and transmission electron microscopy (TEM) measurements. Due to its nondestructive and expandable nature and compatibility with the current microelectronics industry, this potentially generic method may be used as a reliable technology for the development of diverse and functional TMD-based devices.
Topics & Concepts
DopingPlasmaMaterials scienceTransition metalLayer (electronics)AmmoniaTransition layerNanotechnologyOptoelectronicsChemistryPhysicsQuantum mechanicsOrganic chemistryCatalysisBiochemistry2D Materials and ApplicationsPerovskite Materials and ApplicationsGa2O3 and related materials