Surface activated bonding of aluminum oxide films at room temperature
Jun Utsumi, Ryo Takigawa
Topics & Concepts
SapphireMaterials scienceAmorphous solidCrystallinityAnodic bondingChemical bondLayer (electronics)AluminiumAluminium oxideTransmission electron microscopySilicon on sapphireComposite materialCrystallographyNanotechnologySiliconMetallurgyOpticsChemistrySilicon on insulatorLaserPhysicsOrganic chemistry3D IC and TSV technologiesElectronic Packaging and Soldering TechnologiesCopper Interconnects and Reliability