Scanning interferometric phase-calculation formula for simultaneous topographic profiling of thickness and surface of optical flats
Wonjun Bae, Yangjin Kim, Seokyoung Ahn, Yusuke Ito, Naohiko Sugita
Topics & Concepts
Zernike polynomialsInterferometryOpticsFizeau interferometerMaterials sciencePiston (optics)WavelengthProfiling (computer programming)Standard deviationAstronomical interferometerPhysicsMathematicsWavefrontComputer scienceOperating systemStatisticsOptical measurement and interference techniquesAdvanced Measurement and Metrology TechniquesSurface Roughness and Optical Measurements