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Widely-Tunable MEMS Phononic Frequency Combs by Multistage Bifurcations Under a Single-Tone Excitation

Jiahao Wu, Penghui Song, Shuke Zang, Yan Qiao, Ronghua Huan, Wenming Zhang, Lei Shao

2024Journal of Microelectromechanical Systems17 citationsDOI

Abstract

This paper reports the generation and evolution mechanisms of phononic frequency combs by a nonlinear modal-coupling MEMS resonator that can form one-to-three internal resonance. Through proper frequency sweeping, phenomena of frequency locking and internal resonance are first observed on the amplitude-frequency curve. The phononic frequency combs’ generation region is then confirmed to locate exactly at the strongest internal resonance region, and its turn-on procedure and conditions are carefully presented. Both forward and reverse frequency sweeps are used to demonstrate the multistage evolution of phononic frequency combs, showing comprehensive nonlinear dynamics including chaos, period-doubling bifurcation, and cyclic-fold bifurcation. These rich bifurcations allow a wide tunability in comb tooth spacing, which evolves from 25 Hz to more than 200 Hz, reaching an order of magnitude. 2024-0013

Topics & Concepts

ResonatorBifurcationResonance (particle physics)Nonlinear systemAmplitudeCoupling (piping)AcousticsExcitationMicroelectromechanical systemsPhysicsMaterials scienceOpticsOptoelectronicsParticle physicsQuantum mechanicsMetallurgyAdvanced Fiber Laser TechnologiesMechanical and Optical ResonatorsAcoustic Wave Resonator Technologies
Widely-Tunable MEMS Phononic Frequency Combs by Multistage Bifurcations Under a Single-Tone Excitation | Litcius