Aluminum nitride waveguide beam splitters for integrated quantum photonic circuits
Hyeong‐Soon Jang, Donghwa Lee, Hyungjun Heo, Yong‐Su Kim, Hyang‐Tag Lim, Seungwoo Jeon, Sung Moon, Sangin Kim, Sang-Wook Han, Hojoong Jung
Abstract
We demonstrate integrated photonic circuits for quantum devices using sputtered polycrystalline aluminum nitride (AlN) on insulator. On-chip AlN waveguide directional couplers, which are one of the most important components in quantum photonics, are fabricated and show the output power splitting ratios from 50:50 to 99:1. Polarization beam splitters with an extinction ratio of more than 10 dB are also realized from the AlN directional couplers. Using the fabricated AlN waveguide beam splitters, we observe Hong–Ou–Mandel interference with a visibility of 91.7 % ±5.66 % .
Topics & Concepts
Materials sciencePower dividers and directional couplersPhotonicsBeam splitterOptoelectronicsPhotonic integrated circuitElectronic circuitWaveguideOpticsExtinction ratioNitrideLaserPhysicsNanotechnologyQuantum mechanicsLayer (electronics)WavelengthPhotonic and Optical DevicesAdvanced Fiber Laser TechnologiesSemiconductor Quantum Structures and Devices