Magnetron sputtering for development of nanostructured materials
Ajit Behera, Shampa Aich, T. Theivasanthi
Topics & Concepts
Materials scienceSputter depositionHigh-power impulse magnetron sputteringSputteringCavity magnetronNanotechnologyEngineering physicsThin filmEngineeringZnO doping and propertiesIon-surface interactions and analysisCopper-based nanomaterials and applications