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The generation mechanism and suppression method of the "comet tail" defect on the single-crystal silicon surface polishing with magnetorheological

Feng Shi, Shuo Qiao, Ye Tian, Ci Song, Guipeng Tie, Zhaoyang Jiao, Chi Luo, Gang Zhou

2022Ceramics International14 citationsDOI

Topics & Concepts

PolishingMaterials scienceSurface roughnessMagnetorheological fluidMachiningCometOpticsSiliconSurface finishComposite materialStructural engineeringOptoelectronicsPhysicsMetallurgyEngineeringAstrophysicsDamperAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationLaser Material Processing Techniques
The generation mechanism and suppression method of the "comet tail" defect on the single-crystal silicon surface polishing with magnetorheological | Litcius