Surface evolution of fused silica hemispherical resonators and its influence on the quality factor
Changhong Wang, Youhuan Ning, Wenyue Zhao, Guoxing Yi, Yan Huo
Topics & Concepts
ResonatorEtching (microfabrication)Materials scienceQ factorIsotropic etchingMicroelectromechanical systemsHydrofluoric acidOpticsOptoelectronicsGyroscopeSurface (topology)NanotechnologyGeometryLayer (electronics)PhysicsQuantum mechanicsMathematicsMetallurgyAdvanced MEMS and NEMS TechnologiesAcoustic Wave Resonator TechnologiesPhotonic and Optical Devices