A selective methane gas sensor based on metal oxide semiconductor equipped with an on-chip microfilter
Ruijie Wu, Liang Tian, Hao Li, Huabin Liu, Jiaxin Luo, Xuemin Tian, Zhongqiu Hua, Yi Wu, Shurui Fan
Topics & Concepts
MethaneMaterials scienceOxideSemiconductorIndium tin oxideOptoelectronicsMetalNanotechnologyChemistryLayer (electronics)MetallurgyOrganic chemistryGas Sensing Nanomaterials and SensorsAdvanced Chemical Sensor TechnologiesAnalytical Chemistry and Sensors