Nitrogen flux effect on the mechanical properties of AlCrTiN Nanostructured coatings obtained by R. F. magnetron sputtering
Fredy Alejandro Orjuela, Fabio Fernando Vallejo, Horst Hahn, J.J. Olaya, J.E. Alfonso, Leonardo Velasco
Topics & Concepts
Materials scienceMicrostructureX-ray photoelectron spectroscopyCrystalliteSputter depositionScanning electron microscopeSubstrate (aquarium)Wurtzite crystal structureComposite materialSiliconAlloySputteringMetallurgyThin filmChemical engineeringNanotechnologyZincOceanographyGeologyEngineeringMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchGaN-based semiconductor devices and materials