Effect of coating density on plasma etch resistance and material loss of Y2O3 coatings
Gyutae Park, Hyunho Yang, Minjin Lee, Kiin Choi, Hyun S. Kum
Topics & Concepts
Materials scienceCoatingPlasmaComposite materialPlasma etchingEtching (microfabrication)Layer (electronics)PhysicsQuantum mechanicsPlasma Diagnostics and ApplicationsMetal and Thin Film MechanicsSemiconductor materials and devices