Response analysis of MEMS based high-g acceleration threshold switch under mechanical shock
Virender Singh, Vijay Kumar, Ashish Saini, P.K. Khosla, Sunita Mishra
Topics & Concepts
Microelectromechanical systemsShock (circulatory)AccelerationMaterials scienceWaferSilicon on insulatorNatural frequencyShock response spectrumSolid mechanicsStructural engineeringMechanicsAcousticsOptoelectronicsSiliconComposite materialEngineeringPhysicsVibrationClassical mechanicsInternal medicineMedicineAdvanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsForce Microscopy Techniques and Applications