GaAs milling with neon focused ion beam: Comparison with gallium focused ion beam milling and subsurface damage analysis
Deying Xia, Ying‐Bing Jiang, John Notte, Doug Runt
Topics & Concepts
Focused ion beamGalliumNeonMaterials scienceIon beamTransmission electron microscopyIonBeam (structure)NanotechnologyOpticsAtomic physicsMetallurgyChemistryArgonOrganic chemistryPhysicsIntegrated Circuits and Semiconductor Failure AnalysisElectron and X-Ray Spectroscopy TechniquesIon-surface interactions and analysis